BibTeX record conf/nems/TsengLMFF14

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@inproceedings{DBLP:conf/nems/TsengLMFF14,
  author       = {Kuo{-}Chun Tseng and
                  Te{-}Hsun Lin and
                  Norbert Modsching and
                  Weileun Fang and
                  Chien{-}Chung Fu},
  title        = {Polymer material grating used on contactless sub-wavelength {MEMS}
                  physical sensors},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {592--595},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908881},
  doi          = {10.1109/NEMS.2014.6908881},
  timestamp    = {Fri, 13 Aug 2021 09:26:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TsengLMFF14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}