BibTeX record conf/nems/ToanKSSO14

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@inproceedings{DBLP:conf/nems/ToanKSSO14,
  author       = {Nguyen Van Toan and
                  Tomohiro Kubota and
                  Halubai Seknar and
                  Seiji Samukawa and
                  Takahito Ono},
  title        = {Fabrication and evaluation of silicon micromechanical resonator using
                  neutral beam etching technology},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908747},
  doi          = {10.1109/NEMS.2014.6908747},
  timestamp    = {Sun, 12 Nov 2023 02:09:56 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ToanKSSO14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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