BibTeX record conf/nems/SunLYY10

download as .bib file

@inproceedings{DBLP:conf/nems/SunLYY10,
  author       = {Lina Sun and
                  T. Ming{-}Hung Lee and
                  Zhenchuan Yang and
                  Guizhen Yan},
  title        = {Fabrication of Sub-100-nm silicon nanowire devices on {SOI} wafer
                  by {CMOS} compatible fabrication process},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {971--974},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592606},
  doi          = {10.1109/NEMS.2010.5592606},
  timestamp    = {Tue, 13 Feb 2024 20:46:01 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/SunLYY10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.