BibTeX record conf/nems/MingLLSZWTXC16

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@inproceedings{DBLP:conf/nems/MingLLSZWTXC16,
  author       = {Anjie Ming and
                  Weibing Liu and
                  Lingling Li and
                  Xilong Sun and
                  Xuan Zheng and
                  Weibing Wang and
                  Qiulin Tan and
                  Jijun Xiong and
                  Dapeng Chen},
  title        = {Research of periodic amorphous carbon composite films for {MEMS} {IR}
                  source fabricated by magnetron sputtering},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {366--369},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758269},
  doi          = {10.1109/NEMS.2016.7758269},
  timestamp    = {Mon, 09 Aug 2021 14:54:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/MingLLSZWTXC16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}