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BibTeX record conf/nems/LiuLLHH10
@inproceedings{DBLP:conf/nems/LiuLLHH10, author = {Bo Liu and Zhiqiu Lv and Zhihong Li and Xunjun He and Yilong Hao}, title = {A surface micromachining process utilizing dual metal sacrificial layer for fabrication of {RF} {MEMS} switch}, booktitle = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010}, pages = {620--623}, publisher = {{IEEE}}, year = {2010}, url = {https://doi.org/10.1109/NEMS.2010.5592479}, doi = {10.1109/NEMS.2010.5592479}, timestamp = {Sun, 02 Oct 2022 16:12:55 +0200}, biburl = {https://dblp.org/rec/conf/nems/LiuLLHH10.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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