BibTeX record conf/nems/LinHYTF14

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@inproceedings{DBLP:conf/nems/LinHYTF14,
  author       = {T. Lin and
                  T. Huang and
                  Y. Yang and
                  K. Tseng and
                  C. Fu},
  title        = {Throughput comparison of multi-exposure and multi-beam laser interference
                  lithography on nano patterned sapphire substrate process},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {555--559},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908873},
  doi          = {10.1109/NEMS.2014.6908873},
  timestamp    = {Fri, 13 Aug 2021 09:26:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LinHYTF14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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