BibTeX record conf/nems/LiDXZLSZ14

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@inproceedings{DBLP:conf/nems/LiDXZLSZ14,
  author       = {Lei Li and
                  Kangfa Deng and
                  Wen Xia and
                  Ningli Zhu and
                  Song Li and
                  Weiguo Su and
                  Wei Zhang},
  title        = {A convenient wafer level bonding based on unpatterned {BCB}},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {502--506},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908859},
  doi          = {10.1109/NEMS.2014.6908859},
  timestamp    = {Sun, 02 Oct 2022 16:12:55 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiDXZLSZ14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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