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BibTeX record conf/nems/LiDXQZX21
@inproceedings{DBLP:conf/nems/LiDXQZX21, author = {Dongsheng Li and Hanyong Dong and Zihao Xie and Mengjiao Qu and Qian Zhang and Jin Xie}, title = {Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes}, booktitle = {16th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021}, pages = {1419--1422}, publisher = {{IEEE}}, year = {2021}, url = {https://doi.org/10.1109/NEMS51815.2021.9451433}, doi = {10.1109/NEMS51815.2021.9451433}, timestamp = {Tue, 29 Jun 2021 11:02:48 +0200}, biburl = {https://dblp.org/rec/conf/nems/LiDXQZX21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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