BibTeX record conf/nems/LiDXQZX21

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@inproceedings{DBLP:conf/nems/LiDXQZX21,
  author       = {Dongsheng Li and
                  Hanyong Dong and
                  Zihao Xie and
                  Mengjiao Qu and
                  Qian Zhang and
                  Jin Xie},
  title        = {Humidity Sensor with High Resolution and Fast Response Based on AlN
                  Cantilever with Two Groups of Segmented Electrodes},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {1419--1422},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451433},
  doi          = {10.1109/NEMS51815.2021.9451433},
  timestamp    = {Tue, 29 Jun 2021 11:02:48 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiDXQZX21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}