Fabrication and performance analysis of an amorphous silicon-based thermal IR detector.

Hyun Oh Kang Zhao Zhiguo Seong Ki Jeon Ho Jung Hak-Rin Kim Dae-Hyuk Kwon Jung-Hee Lee Shin-Won Kang Seong-Ho Kong Fabrication and performance analysis of an amorphous silicon-based thermal IR detector. 696-699 2010 NEMS http://dx.doi.org/10.1109/NEMS.2010.5592504 conf/nems/2010 db/conf/nems/nems2010.html#KangZJJKKLKK10