BibTeX record conf/nems/JiaoOQWLT23

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@inproceedings{DBLP:conf/nems/JiaoOQWLT23,
  author       = {Shimin Jiao and
                  Hao Ouyang and
                  Ziqiang Qu and
                  Qiu Wang and
                  Huafeng Liu and
                  Liang Cheng Tu},
  title        = {An Opto-mechanical {MEMS} Accelerometer with Noise Floor of 40 ng/Hz\({}^{\mbox{1/2}}\)},
  booktitle    = {18th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2023, Jeju Island, Korea, Republic of, May
                  14-17, 2023},
  pages        = {140--143},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/NEMS57332.2023.10190865},
  doi          = {10.1109/NEMS57332.2023.10190865},
  timestamp    = {Mon, 14 Aug 2023 15:37:27 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/JiaoOQWLT23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}