BibTeX record conf/nems/JiangZJPJ09

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@inproceedings{DBLP:conf/nems/JiangZJPJ09,
  author       = {Zhuangde Jiang and
                  Fengxia Zhao and
                  Weixuan Jing and
                  Philip D. Prewett and
                  Kyle Jiang},
  title        = {Characterization of line edge roughness and line width roughness of
                  nano-scale typical structures},
  booktitle    = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages        = {299--303},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/NEMS.2009.5068582},
  doi          = {10.1109/NEMS.2009.5068582},
  timestamp    = {Thu, 23 Mar 2023 23:58:03 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/JiangZJPJ09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}