BibTeX record conf/nems/HuSQ21

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@inproceedings{DBLP:conf/nems/HuSQ21,
  author       = {Xia Hu and
                  Ouyang Su and
                  Lifeng Qin},
  title        = {The Influence of Electrode on Elastic Constant {\textdollar}C{\_}\{33\}\{\}{\^{}}\{D\}{\textdollar}
                  Extraction of Scandium-doped Aluminum Nitride Thin Film by Thickness-extensional
                  Mode {FBAR}},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {1718--1722},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451302},
  doi          = {10.1109/NEMS51815.2021.9451302},
  timestamp    = {Mon, 28 Jun 2021 16:07:08 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuSQ21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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