BibTeX record conf/nems/HsuKKYH16

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@inproceedings{DBLP:conf/nems/HsuKKYH16,
  author       = {Chia{-}Liang Hsu and
                  Kunal Kashyap and
                  Amarendra Kumar and
                  J. Andrew Yeh and
                  Max T. Hou},
  title        = {Backside nanotexturing protected by thin silicon layer for high bending
                  strength ICs},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {569--572},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758316},
  doi          = {10.1109/NEMS.2016.7758316},
  timestamp    = {Mon, 09 Aug 2021 14:54:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HsuKKYH16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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