BibTeX record conf/nems/GuiZLHG16

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@inproceedings{DBLP:conf/nems/GuiZLHG16,
  author       = {Yiming Gui and
                  Yangxi Zhang and
                  Guandong Liu and
                  Yilong Hao and
                  Chengchen Gao},
  title        = {Design and simulation of corrugated diaphragm applied to the {MEMS}
                  fiber optic pressure sensor},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {152--155},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758220},
  doi          = {10.1109/NEMS.2016.7758220},
  timestamp    = {Sat, 30 Sep 2023 09:53:53 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GuiZLHG16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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