BibTeX record conf/nems/GoldscheKKNSGTM14

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@inproceedings{DBLP:conf/nems/GoldscheKKNSGTM14,
  author       = {Matthias Goldsche and
                  Tymofiy Khodkov and
                  Pascal Kaienburg and
                  Christoph Neumann and
                  Christoph Stampfer and
                  Stefan Trellenkamp and
                  Gregor Mussler},
  title        = {Low-temperature compatible electrostatic comb-drive actuators with
                  integrated graphene},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {251--255},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908802},
  doi          = {10.1109/NEMS.2014.6908802},
  timestamp    = {Sat, 30 Sep 2023 09:53:53 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GoldscheKKNSGTM14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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