BibTeX record conf/nems/GohSCCTT18

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@inproceedings{DBLP:conf/nems/GohSCCTT18,
  author       = {Simon Chun Kiat Goh and
                  Li Lynn Shiau and
                  Nan Chen and
                  Kailiang Chuan and
                  Beng Kang Tay and
                  Chuan Seng Tan},
  title        = {Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter
                  Using {SU-8} as Mask},
  booktitle    = {13th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2018, Singapore, Singapore, April 22-26,
                  2018},
  pages        = {652--655},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/NEMS.2018.8556967},
  doi          = {10.1109/NEMS.2018.8556967},
  timestamp    = {Thu, 14 Oct 2021 10:18:51 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GohSCCTT18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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