BibTeX record conf/nems/GaoZSZ18

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@inproceedings{DBLP:conf/nems/GaoZSZ18,
  author       = {Kai Gao and
                  Qiyuan Zhang and
                  Weiguo Su and
                  Wei Zhang},
  title        = {Patterned Al-Ge Wafer Bonding for Reducing In-Process Side Leakage
                  of Eutectic},
  booktitle    = {13th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2018, Singapore, Singapore, April 22-26,
                  2018},
  pages        = {332--335},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/NEMS.2018.8556904},
  doi          = {10.1109/NEMS.2018.8556904},
  timestamp    = {Mon, 09 Aug 2021 14:54:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GaoZSZ18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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