BibTeX record conf/nems/FawzyEH18

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@inproceedings{DBLP:conf/nems/FawzyEH18,
  title        = {Optical Coupling of 3D Silicon Micromirrors},
  booktitle    = {13th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2018, Singapore, Singapore, April 22-26,
                  2018},
  pages        = {465--470},
  publisher    = {{IEEE}},
  year         = {2018},
  note         = {Withdrawn.},
  url          = {https://doi.org/10.1109/NEMS.2018.8556972},
  doi          = {10.1109/NEMS.2018.8556972},
  timestamp    = {Tue, 25 Jan 2022 17:24:34 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/FawzyEH18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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