BibTeX record conf/nems/DingMYYDL21

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@inproceedings{DBLP:conf/nems/DingMYYDL21,
  author       = {Guang{-}Hui Ding and
                  Binghe Ma and
                  Yu{-}Chao Yan and
                  Weizheng Yuan and
                  Jinjun Deng and
                  Jian Luo},
  title        = {Through Glass Vias by Wet-etching Process in 49{\%} {HF} Solution
                  Using an {AZ4620} Enhanced Cr/Au Mask},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {872--875},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451296},
  doi          = {10.1109/NEMS51815.2021.9451296},
  timestamp    = {Mon, 28 Jun 2021 16:07:08 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DingMYYDL21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}