BibTeX record conf/nems/ChungHLLCCWCCCKC11

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@inproceedings{DBLP:conf/nems/ChungHLLCCWCCCKC11,
  author       = {Chung{-}Jen Chung and
                  Po{-}Tsung Hsieh and
                  Jen{-}Fin Lin and
                  Cheng{-}Hsiang Lin and
                  Kuo{-}Chih Chiu and
                  Shean{-}Jen Chen and
                  Ching{-}Liang Wei and
                  Wei{-}Tsai Chang and
                  Cheng{-}Ting Chen and
                  Ying{-}Chung Chen and
                  Kuo{-}Sheng Kao and
                  Chien{-}Chuan Cheng},
  title        = {Investigation of acoustic properties and Raman scattering of AlN films
                  for biosensor application},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {618--621},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017431},
  doi          = {10.1109/NEMS.2011.6017431},
  timestamp    = {Fri, 09 Apr 2021 18:46:29 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChungHLLCCWCCCKC11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}