BibTeX record conf/nems/ChuPZX17

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@inproceedings{DBLP:conf/nems/ChuPZX17,
  author       = {Zhaozhi Chu and
                  Chunrong Peng and
                  Fengjie Zheng and
                  Shanhong Xia},
  title        = {An electric field microsensor with metal-silicon structure},
  booktitle    = {12th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
                  2017},
  pages        = {562--565},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/NEMS.2017.8017085},
  doi          = {10.1109/NEMS.2017.8017085},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChuPZX17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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