BibTeX record conf/nems/ChengZLTL15

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@inproceedings{DBLP:conf/nems/ChengZLTL15,
  author       = {Rongjun Cheng and
                  Yulong Zhao and
                  Cun Li and
                  Bian Tian and
                  Bo Li},
  title        = {Research on slide-film damping effect to achieve a high-performance
                  resonant pressure senor},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {99--102},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147383},
  doi          = {10.1109/NEMS.2015.7147383},
  timestamp    = {Wed, 16 Mar 2022 14:18:09 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ChengZLTL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}