BibTeX record conf/nems/ChengLLXCWC21

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@inproceedings{DBLP:conf/nems/ChengLLXCWC21,
  author       = {Chao Cheng and
                  Yadong Li and
                  Yulan Lu and
                  Chao Xiang and
                  Jian Chen and
                  Junbo Wang and
                  Deyong Chen},
  title        = {A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology},
  booktitle    = {16th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021},
  pages        = {193--196},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/NEMS51815.2021.9451493},
  doi          = {10.1109/NEMS51815.2021.9451493},
  timestamp    = {Mon, 23 Oct 2023 15:28:12 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChengLLXCWC21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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