BibTeX record conf/nems/ChenWZL18

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@inproceedings{DBLP:conf/nems/ChenWZL18,
  author       = {Qi Chen and
                  Yifan Wang and
                  Hua Zhang and
                  Zewen Liu},
  title        = {Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays},
  booktitle    = {13th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2018, Singapore, Singapore, April 22-26,
                  2018},
  pages        = {511--514},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/NEMS.2018.8557025},
  doi          = {10.1109/NEMS.2018.8557025},
  timestamp    = {Mon, 09 Aug 2021 14:54:01 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChenWZL18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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