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BibTeX record conf/nems/ChenJLZYYY21
@inproceedings{DBLP:conf/nems/ChenJLZYYY21, author = {Zeji Chen and Qianqian Jia and Wenli Liu and Yinfang Zhu and Quan Yuan and Jinling Yang and Fuhua Yang}, title = {A Capacitively Transduced Bulk Acoustic Wave {MEMS} Resonator with Low Bias Voltages}, booktitle = {16th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2021, Xiamen, China, April 25-29, 2021}, pages = {455--458}, publisher = {{IEEE}}, year = {2021}, url = {https://doi.org/10.1109/NEMS51815.2021.9451294}, doi = {10.1109/NEMS51815.2021.9451294}, timestamp = {Mon, 28 Jun 2021 16:07:08 +0200}, biburl = {https://dblp.org/rec/conf/nems/ChenJLZYYY21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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