BibTeX record conf/nems/ChenDHZ16

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@inproceedings{DBLP:conf/nems/ChenDHZ16,
  author       = {Chun Chen and
                  Yanyan Deng and
                  Peijian He and
                  Min Zhang},
  title        = {Rapid thermal annealing for carbon nanotube thin film transistors
                  by a double-themral-region furnace},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {545--548},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758310},
  doi          = {10.1109/NEMS.2016.7758310},
  timestamp    = {Wed, 23 Feb 2022 10:43:08 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ChenDHZ16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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