BibTeX record conf/nems/ChangYHLHLKHHS15

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@inproceedings{DBLP:conf/nems/ChangYHLHLKHHS15,
  author       = {Chun{-}Ming Chang and
                  Chih{-}Sheng Yu and
                  Fan{-}Chun Hsieh and
                  Chun{-}Ting Lin and
                  Tsung{-}Tao Huang and
                  Ping{-}Hung Lin and
                  Jiann{-}Shiun Kao and
                  Chien{-}Nan Hsiao and
                  Ming{-}Hua Shiao},
  title        = {A parametric study of {ICP-RIE} etching on a lithium niobate substrate},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {485--486},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147473},
  doi          = {10.1109/NEMS.2015.7147473},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChangYHLHLKHHS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}