BibTeX record conf/nems/BurouniBET11

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@inproceedings{DBLP:conf/nems/BurouniBET11,
  author       = {Narges Burouni and
                  Erwin Berenschot and
                  Miko Elwenspoek and
                  Niels R. Tas},
  title        = {Dimensional control in corner lithography for wafer-scale fabrication
                  of nano-apertures},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {940--943},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017509},
  doi          = {10.1109/NEMS.2011.6017509},
  timestamp    = {Wed, 11 Aug 2021 15:12:36 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/BurouniBET11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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