BibTeX record conf/nems/BaekYSKPHOKCLEK13

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@inproceedings{DBLP:conf/nems/BaekYSKPHOKCLEK13,
  author       = {Chul{-}Heum Baek and
                  Litao Yao and
                  Sung{-}Bo Seo and
                  Hwa{-}Min Kim and
                  Dae{-}Seung Pyo and
                  Pyo{-}Hwan Hong and
                  Jung{-}Hwa Oh and
                  Dae{-}Young Kong and
                  Chan{-}Seob Cho and
                  Jong{-}Hyun Lee and
                  In{-}Yong Eom and
                  Bonghwan Kim},
  title        = {Superhydrophobic surface obtained using pyramidal {PTFE} film fabricated
                  on {RIE} etched silicon},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {903--906},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559869},
  doi          = {10.1109/NEMS.2013.6559869},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/BaekYSKPHOKCLEK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}