BibTeX record conf/nanoarch/KwakCY22

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@inproceedings{DBLP:conf/nanoarch/KwakCY22,
  author       = {Jungyoun Kwak and
                  Gihun Choe and
                  Shimeng Yu},
  editor       = {Christof Teuscher and
                  Jie Han},
  title        = {A monolithic 3D design technology co-optimization with back-end-of-line
                  oxide channel transistor},
  booktitle    = {Proceedings of the 17th {ACM} International Symposium on Nanoscale
                  Architectures, {NANOARCH} 2022, Virtual, OR, USA, December 7-9, 2022},
  pages        = {6:1--6:6},
  publisher    = {{ACM}},
  year         = {2022},
  url          = {https://doi.org/10.1145/3565478.3572312},
  doi          = {10.1145/3565478.3572312},
  timestamp    = {Thu, 15 Jun 2023 21:56:56 +0200},
  biburl       = {https://dblp.org/rec/conf/nanoarch/KwakCY22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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