Validated 90nm CMOS Technology Platform with Low-k Copper Interconnects for Advanced System-on-Chip (SoC).

T. Devoivre M. Lunenborg C. Julien J.-P. Carrere P. Ferreira W. J. Toren A. VandeGoor P. Gayet T. Berger O. Hinsinger P. Vannier Y. Trouiller Y. Rody P.-J. Goirand R. Palla I. Thomas F. Guyader D. Roy B. Borot N. Planes S. Naudet F. Pico D. Duca F. Lalanne D. Heslinga M. Haond Validated 90nm CMOS Technology Platform with Low-k Copper Interconnects for Advanced System-on-Chip (SoC). 157-162 2002 conf/mtdt/2002 MTDT http://doi.ieeecomputersociety.org/10.1109/MTDT.2002.1029778 db/conf/mtdt/mtdt2002.html#DevoivreLJCFTVGBHVTRGPTGRBPNPDLHH02