BibTeX record conf/mixdes/MajZSN14

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@inproceedings{DBLP:conf/mixdes/MajZSN14,
  author       = {Cezary Maj and
                  Piotr Zajac and
                  Michal Szermer and
                  Andrzej Napieralski},
  title        = {The influence of residual stress induced by anodic wafer bonding on
                  {MEMS} membrane properties},
  booktitle    = {Proceedings of the 21st International Conference Mixed Design of Integrated
                  Circuits and Systems, {MIXDES} 2014, Lviv, Ukraine, June 19-21, 2014},
  pages        = {93--96},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/MIXDES.2014.6872162},
  doi          = {10.1109/MIXDES.2014.6872162},
  timestamp    = {Fri, 09 Apr 2021 18:37:40 +0200},
  biburl       = {https://dblp.org/rec/conf/mixdes/MajZSN14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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