BibTeX record conf/mhs/UejimaOHS18

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@inproceedings{DBLP:conf/mhs/UejimaOHS18,
  author       = {S. Uejima and
                  Chiemi Oka and
                  Seiichi Hata and
                  Junpei Sakurai},
  title        = {Fabrication of Miniaturized Capacitive Pressure Sensor using Thin
                  Film Metallic Glass},
  booktitle    = {International Symposium on Micro-NanoMechatronics and Human Science,
                  {MHS} 2018, Nagoya, Japan, December 9-12, 2018},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/MHS.2018.8887020},
  doi          = {10.1109/MHS.2018.8887020},
  timestamp    = {Sat, 30 Sep 2023 09:52:39 +0200},
  biburl       = {https://dblp.org/rec/conf/mhs/UejimaOHS18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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