BibTeX record conf/isscc/BilliotMVRHPRGU22

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@inproceedings{DBLP:conf/isscc/BilliotMVRHPRGU22,
  author       = {G{\'{e}}rard Billiot and
                  Paul Mattei and
                  Bogdan Vysotskyi and
                  Adrien Reynaud and
                  Louis Hutin and
                  Christophe Plantier and
                  Emmanuel Rolland and
                  Marc Gely and
                  Giulia Usai and
                  Claude Tabone and
                  Ga{\"{e}}l Pillonnet and
                  St{\'{e}}phanie Robinet and
                  S{\'{e}}bastien Hentz},
  title        = {1024 3D-Stacked Monolithic {NEMS} Array with 375{\(\mu\)}m\({}^{\mbox{2}}\)0.5mW
                  0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric
                  Sensing},
  booktitle    = {{IEEE} International Solid-State Circuits Conference, {ISSCC} 2022,
                  San Francisco, CA, USA, February 20-26, 2022},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/ISSCC42614.2022.9731729},
  doi          = {10.1109/ISSCC42614.2022.9731729},
  timestamp    = {Sun, 12 Nov 2023 02:15:22 +0100},
  biburl       = {https://dblp.org/rec/conf/isscc/BilliotMVRHPRGU22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}