BibTeX record conf/isqed/TianW16

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@inproceedings{DBLP:conf/isqed/TianW16,
  author       = {Haitong Tian and
                  Martin D. F. Wong},
  title        = {Performance evaluation considering mask misalignment in multiple patterning
                  decomposition},
  booktitle    = {17th International Symposium on Quality Electronic Design, {ISQED}
                  2016, Santa Clara, CA, USA, March 15-16, 2016},
  pages        = {192--197},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/ISQED.2016.7479199},
  doi          = {10.1109/ISQED.2016.7479199},
  timestamp    = {Sun, 02 Oct 2022 16:10:05 +0200},
  biburl       = {https://dblp.org/rec/conf/isqed/TianW16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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