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BibTeX record conf/isqed/TianW16
@inproceedings{DBLP:conf/isqed/TianW16, author = {Haitong Tian and Martin D. F. Wong}, title = {Performance evaluation considering mask misalignment in multiple patterning decomposition}, booktitle = {17th International Symposium on Quality Electronic Design, {ISQED} 2016, Santa Clara, CA, USA, March 15-16, 2016}, pages = {192--197}, publisher = {{IEEE}}, year = {2016}, url = {https://doi.org/10.1109/ISQED.2016.7479199}, doi = {10.1109/ISQED.2016.7479199}, timestamp = {Sun, 02 Oct 2022 16:10:05 +0200}, biburl = {https://dblp.org/rec/conf/isqed/TianW16.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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