BibTeX record conf/isqed/SukharevMKMKCLHOKK09

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@inproceedings{DBLP:conf/isqed/SukharevMKMKCLHOKK09,
  author       = {Valeriy Sukharev and
                  Ara Markosian and
                  Armen Kteyan and
                  Levon Manukyan and
                  Nikolay Khachatryan and
                  Jun{-}Ho Choy and
                  Hasmik Lazaryan and
                  Henrik Hovsepyan and
                  Seiji Onoue and
                  Takuo Kikuchi and
                  Tetsuya Kamigaki},
  title        = {Control of design specific variation in etch-assisted via pattern
                  transfer by means of full-chip simulation},
  booktitle    = {10th International Symposium on Quality of Electronic Design {(ISQED}
                  2009), 16-18 March 2009, San Jose, CA, {USA}},
  pages        = {156--161},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/ISQED.2009.4810286},
  doi          = {10.1109/ISQED.2009.4810286},
  timestamp    = {Thu, 23 Mar 2023 23:58:32 +0100},
  biburl       = {https://dblp.org/rec/conf/isqed/SukharevMKMKCLHOKK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}