Ye Chen Zheng Shi Xiaolang Yan An Automated and Fast OPC Algorithm for OPC-Aware Layout Design. 782-787 2007 conf/isqed/2007 ISQED http://doi.ieeecomputersociety.org/10.1109/ISQED.2007.32 db/conf/isqed/isqed2007.html#ChenSY07