BibTeX record conf/ispd/Lin23

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@inproceedings{DBLP:conf/ispd/Lin23,
  author       = {Burn J. Lin},
  editor       = {David G. Chinnery and
                  Iris Hui{-}Ru Jiang},
  title        = {Immersion and {EUV} Lithography: Two Pillars to Sustain Single-Digit
                  Nanometer Nodes},
  booktitle    = {Proceedings of the 2023 International Symposium on Physical Design,
                  {ISPD} 2023, Virtual Event, USA, March 26-29, 2023},
  pages        = {104},
  publisher    = {{ACM}},
  year         = {2023},
  url          = {https://doi.org/10.1145/3569052.3578910},
  doi          = {10.1145/3569052.3578910},
  timestamp    = {Tue, 28 Mar 2023 19:49:41 +0200},
  biburl       = {https://dblp.org/rec/conf/ispd/Lin23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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