DBLP Record 'conf/ispd/BermanKVWZ99'

BibTeX

@inproceedings{DBLP:conf/ispd/BermanKVWZ99,
  author    = {Piotr Berman and
               Andrew B. Kahng and
               Devendra Vidhani and
               Huijuan Wang and
               Alexander Zelikovsky},
  title     = {Optimal phase conflict removal for layout of dark field
               alternating phase shifting masks},
  booktitle = {ISPD},
  year      = {1999},
  pages     = {121-126},
  ee        = {http://doi.acm.org/10.1145/299996.300037},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}