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BibTeX record conf/isnn/RyuLPPH06
@inproceedings{DBLP:conf/isnn/RyuLPPH06, author = {Kyung{-}Han Ryu and Song{-}Jae Lee and Jaehyun Park and Dong{-}Chul Park and Sang Hong}, editor = {Jun Wang and Zhang Yi and Jacek M. Zurada and Bao{-}Liang Lu and Hujun Yin}, title = {Fault Detection of Reactive Ion Etching Using Time Series Neural Networks}, booktitle = {Advances in Neural Networks - {ISNN} 2006, Third International Symposium on Neural Networks, Chengdu, China, May 28 - June 1, 2006, Proceedings, Part {III}}, series = {Lecture Notes in Computer Science}, volume = {3973}, pages = {376--381}, publisher = {Springer}, year = {2006}, url = {https://doi.org/10.1007/11760191\_56}, doi = {10.1007/11760191\_56}, timestamp = {Sun, 12 Mar 2023 13:33:15 +0100}, biburl = {https://dblp.org/rec/conf/isnn/RyuLPPH06.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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