Yu Sun 0001 Michael A. Greminger David P. Potasek Bradley J. Nelson A Visually Servoed MEMS Manipulator. 255-264 2002 ISER http://dx.doi.org/10.1007/3-540-36268-1_22 conf/iser/2002 db/conf/iser/iser2002.html#SunGPN02