@inproceedings{DBLP:conf/iscas/SugiharaTNIHKHKMMO06,
author = {Makoto Sugihara and
Taiga Takata and
Kenta Nakamura and
Ryoichi Inanami and
Hiroaki Hayashi and
Katsumi Kishimoto and
Tetsuya Hasebe and
Yukihiro Kawano and
Yusuke Matsunaga and
Kazuaki Murakami and
Katsuya Okumura},
title = {A character size optimization technique for throughput enhancement
of character projection lithography},
booktitle = {ISCAS},
year = {2006},
ee = {http://dx.doi.org/10.1109/ISCAS.2006.1693146},
crossref = {DBLP:conf/iscas/2006},
bibsource = {DBLP, http://dblp.uni-trier.de}
}
@proceedings{DBLP:conf/iscas/2006,
title = {International Symposium on Circuits and Systems (ISCAS 2006),
21-24 May 2006, Island of Kos, Greece},
publisher = {IEEE},
year = {2006},
bibsource = {DBLP, http://dblp.uni-trier.de}
}