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BibTeX record conf/irps/WehringHGCUSBSM20
@inproceedings{DBLP:conf/irps/WehringHGCUSBSM20, author = {Betting Wehring and Raik Hoffmann and Lukas Gerlich and Malte Czernohorsky and Benjamin Uhlig and Robert Seidel and Tobias Barchewitz and Frank Schlaphof and Lutz Meinshausen and Christoph Leyens}, title = {BEoL Reliability, {XPS} and {REELS} Study on low-k Dielectrics to understand Breakdown Mechanisms}, booktitle = {2020 {IEEE} International Reliability Physics Symposium, {IRPS} 2020, Dallas, TX, USA, April 28 - May 30, 2020}, pages = {1--5}, publisher = {{IEEE}}, year = {2020}, url = {https://doi.org/10.1109/IRPS45951.2020.9129285}, doi = {10.1109/IRPS45951.2020.9129285}, timestamp = {Wed, 20 Jan 2021 09:07:40 +0100}, biburl = {https://dblp.org/rec/conf/irps/WehringHGCUSBSM20.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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