BibTeX record conf/irps/TiernoCARBR21

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@inproceedings{DBLP:conf/irps/TiernoCARBR21,
  author       = {Davide Tierno and
                  Kristof Croes and
                  Arjun Ajaykumar and
                  Siva Ramesh and
                  Geert Van den Bosch and
                  Maarten Rosmeulen},
  title        = {Reliability of Mo as Word Line Metal in 3D {NAND}},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2021, Monterey,
                  CA, USA, March 21-25, 2021},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/IRPS46558.2021.9405132},
  doi          = {10.1109/IRPS46558.2021.9405132},
  timestamp    = {Thu, 14 Oct 2021 10:37:09 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/TiernoCARBR21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}