BibTeX record conf/irps/ShenWZBSZGBW20

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@inproceedings{DBLP:conf/irps/ShenWZBSZGBW20,
  author       = {Tian Shen and
                  Koji Watanabe and
                  Huimei Zhou and
                  Michael Belyansky and
                  Erin Stuckert and
                  Jingyun Zhang and
                  Andrew Greene and
                  Veeraraghavan S. Basker and
                  Miaomiao Wang},
  title        = {A new technique for evaluating stacked nanosheet inner spacer {TDDB}
                  reliability},
  booktitle    = {2020 {IEEE} International Reliability Physics Symposium, {IRPS} 2020,
                  Dallas, TX, USA, April 28 - May 30, 2020},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/IRPS45951.2020.9129258},
  doi          = {10.1109/IRPS45951.2020.9129258},
  timestamp    = {Wed, 28 Jun 2023 16:23:50 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/ShenWZBSZGBW20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}