BibTeX record conf/irps/SekiNM20

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@inproceedings{DBLP:conf/irps/SekiNM20,
  author       = {Harumi Seki and
                  Yasushi Nakasaki and
                  Yuichiro Mitani},
  title        = {Further Investigation on Mechanism of Trap Level Modulation in Silicon
                  Nitride Films by Fluorine Incorporation},
  booktitle    = {2020 {IEEE} International Reliability Physics Symposium, {IRPS} 2020,
                  Dallas, TX, USA, April 28 - May 30, 2020},
  pages        = {1--7},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/IRPS45951.2020.9128224},
  doi          = {10.1109/IRPS45951.2020.9128224},
  timestamp    = {Thu, 30 Jul 2020 15:14:26 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/SekiNM20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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