BibTeX record conf/irps/SekiIHNSS23

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@inproceedings{DBLP:conf/irps/SekiIHNSS23,
  author       = {Harumi Seki and
                  Reika Ichihara and
                  Yusuke Higashi and
                  Yasushi Nakasaki and
                  Masumi Saitoh and
                  Masamichi Suzuki},
  title        = {Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range
                  of Time Constants Based on Dynamic {C-V}},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2023, Monterey,
                  CA, USA, March 26-30, 2023},
  pages        = {1--7},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/IRPS48203.2023.10118083},
  doi          = {10.1109/IRPS48203.2023.10118083},
  timestamp    = {Wed, 24 May 2023 09:43:44 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/SekiIHNSS23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}