BibTeX record conf/irps/KimNOLKLKSHL21

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@inproceedings{DBLP:conf/irps/KimNOLKLKSHL21,
  author       = {Seung{-}Mo Kim and
                  Thi Mi Hanh Nyugen and
                  Jungwon Oh and
                  Yongsu Lee and
                  Soo Cheol Kang and
                  Ho{-}In Lee and
                  Cihyun Kim and
                  Surajit Some and
                  Hyeon Jun Hwang and
                  Byoung Hun Lee},
  title        = {Drastic reliability improvement using {H2O2/UV} treatment of HfO2
                  for heterogeneous integration},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2021, Monterey,
                  CA, USA, March 21-25, 2021},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/IRPS46558.2021.9405126},
  doi          = {10.1109/IRPS46558.2021.9405126},
  timestamp    = {Thu, 20 May 2021 08:27:16 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/KimNOLKLKSHL21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}