BibTeX record conf/irps/ChenLHCCLH22

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@inproceedings{DBLP:conf/irps/ChenLHCCLH22,
  author       = {P. S. Chen and
                  Y. W. Lee and
                  D. S. Huang and
                  S. C. Chen and
                  C. F. Cheng and
                  J. H. Lee and
                  Jun He},
  title        = {{AC} {TDDB} Analysis for {HK/IL} Gate Stack Breakdown and Frequency-dependent
                  Oxygen Vacancy Trap Generation in Advanced nodes FinFET Devices by
                  {SILC} Spectrum Methodology},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2022, Dallas,
                  TX, USA, March 27-31, 2022},
  pages        = {11},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/IRPS48227.2022.9764512},
  doi          = {10.1109/IRPS48227.2022.9764512},
  timestamp    = {Mon, 09 May 2022 18:11:26 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/ChenLHCCLH22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}