BibTeX record conf/irps/ChenKFSOKO21

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@inproceedings{DBLP:conf/irps/ChenKFSOKO21,
  author       = {Zhwen Chen and
                  Young{-}Suk Kim and
                  Tadashi Fukuda and
                  Koji Sakui and
                  Takayuki Ohba and
                  Tatsuji Kobayashi and
                  Takashi Obara},
  title        = {Reliability of Wafer-Level Ultra-Thinning down to 3 {\(\mathrm{\mu}\)}m
                  using 20 nm-Node DRAMs},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2021, Monterey,
                  CA, USA, March 21-25, 2021},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/IRPS46558.2021.9405125},
  doi          = {10.1109/IRPS46558.2021.9405125},
  timestamp    = {Wed, 05 May 2021 14:20:15 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/ChenKFSOKO21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}